The electrical conductivity of LPCVD polysilicon doped with oxygen atoms(acromymSIPOS)films has been measured to study the electrical properties of SIPOS.The results showthat the electrical properties of SIPOS depend ...The electrical conductivity of LPCVD polysilicon doped with oxygen atoms(acromymSIPOS)films has been measured to study the electrical properties of SIPOS.The results showthat the electrical properties of SIPOS depend on both oxygen contents and annealing processes.The electrical conductivity decreases while the oxygen content in SIPOS increases.The temper-.ature dependence of the electrical conductivity of SIPOS during annealing shows that there aretwo kinds of conduction mechanisms,that is,conductivities of SIPOS are concerned in the reac-tion of Si-O bonds and the recrystallization of SIPOS during low temperature500℃)and hightemperature900℃)annealing,respectively.In addition,the doping effect on the conductivityof SIPOS has been studied.It has been observed that doping made the increase of conductivityin SIPOS,but the oxygen contents apparently suppressed the increase of conductivity in doped-SIPOS.展开更多
文摘The electrical conductivity of LPCVD polysilicon doped with oxygen atoms(acromymSIPOS)films has been measured to study the electrical properties of SIPOS.The results showthat the electrical properties of SIPOS depend on both oxygen contents and annealing processes.The electrical conductivity decreases while the oxygen content in SIPOS increases.The temper-.ature dependence of the electrical conductivity of SIPOS during annealing shows that there aretwo kinds of conduction mechanisms,that is,conductivities of SIPOS are concerned in the reac-tion of Si-O bonds and the recrystallization of SIPOS during low temperature500℃)and hightemperature900℃)annealing,respectively.In addition,the doping effect on the conductivityof SIPOS has been studied.It has been observed that doping made the increase of conductivityin SIPOS,but the oxygen contents apparently suppressed the increase of conductivity in doped-SIPOS.
