Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly ...Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly that circumvents the diffraction limit of conventional photolithography.Recently,the International Roadmap for Devices and Systems listed DSA as one of the advanced lithography techniques for the fabrication of 3-5 nm technology node devices.DSA can be combined with other lithography techniques,such as extreme ultra violet(EUV)and 193 nm immersion(193i),to further enhance the patterning resolution and the device density.So far,DSA has demonstrated its superior ability for the fabrication of nanoscale devices,such as fin field effect transistor and bit pattern media,offering a variety of configurations for high-density integration and low-cost manufacturing.Over 1 T in-2 device density can be achieved either by direct templating or coupled with nanoimprinting to improve the throughput.The development of high x block copolymer further enhances the patterning resolution of DSA.In addition to its superiority in high-resolution patterning,the implementation ofDSA on a 300 mm pivot line fully demonstrates its potential for large-scale,high-throughput,and cost-effective manufacturing in industrial environment.展开更多
导向自组装(Directed Self-Assembly,DSA)光刻技术是一种极具发展潜力的新型图形化工艺,已被国际器件与系统路线图(International Roadmap for Devices and Systems,IRDS)列为下一代光刻技术的主要候选方案。DSA光刻技术是基于嵌段共聚...导向自组装(Directed Self-Assembly,DSA)光刻技术是一种极具发展潜力的新型图形化工艺,已被国际器件与系统路线图(International Roadmap for Devices and Systems,IRDS)列为下一代光刻技术的主要候选方案。DSA光刻技术是基于嵌段共聚物(Block Copolymer,BCP)自组装构建高分辨图案,能够突破传统光学光刻的衍射极限,具有高通量、低成本和延续性好等显著优势,已成为半导体工艺技术中的研发热点。将DSA与其它光刻技术如极紫外(Extreme Ultraviolet,EUV)光刻、深紫外(Deep Ultraviolet,DUV)光刻、紫外光刻和纳米压印光刻(Nanoimprint Lithography,NIL)等相结合,能极大地提高加工结构的分辨率以及器件的密度。目前,DSA光刻技术已被应用于鳍式场效应晶体管(Fin Field-Effect Transistor,FinFET)、存储器和光电子器件等领域,以期实现高密度集成和高效率低成本制造。本文对DSA光刻技术的原理、材料、工艺、应用以及在工业化进程中所面临的机遇和挑战进行全面的综述。展开更多
Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/ch...Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/chiral assembly and 3D printing technology,providing precise spatial control over chiral nano/microstructures of rod-shaped colloidal nanoparticles in intricate geometries.We designed reactive chiral inks based on cellulose nanocrystal(CNC)suspensions and acrylamide monomers,enabling the chiral assembly at nano/microscale,beyond the resolution seen in printed materials.We employed a range of complementary techniques including Orthogonal Superposition rheometry and in situ rheo-optic measurements under steady shear rate conditions.These techniques help us to understand the nature of the nonlinear flow behavior of the chiral inks,and directly probe the flow-induced microstructural dynamics and phase transitions at constant shear rates,as well as their post-flow relaxation.Furthermore,we analyzed the photo-curing process to identify key parameters affecting gelation kinetics and structural integrity of the printed object within the supporting bath.These insights into the interplay between the chiral inks self-assembly dynamics,3D printing flow kinematics and photopolymerization kinetics provide a roadmap to direct the out-of-equilibrium arrangement of CNC particles in the 3D printed filaments,ranging from uniform nematic to 3D concentric chiral structures with controlled pitch length,as well as random orientation of chiral domains.Our biomimetic approach can pave the way for the creation of materials with superior mechanical properties or programable photonic responses that arise from 3D nano/microstructure and can be translated into larger scale 3D printed designs.展开更多
We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field t...We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field theory and derive,in a non-parametric setting,the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape.The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized.The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical interconnect accesses(VIA).展开更多
Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to...Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to expand innovative applications.Here,we develop a track-guided self-transportation system mediated by sequential wettability transition accompanied with capillary transportation.Alkaline fuel is loaded into polydimethylsiloxane(PDMS)cuboid to trigger the wettability transition of distributed superhydrophobic tracks laid in shallow water.After the wettability transition,the induced capillary force can propel the repetitive track-to-track transportation of PDMS.Importantly,the spacing between adjacent tracks is rationally designed based on multiple factors including threshold of wettability transition,diffusion kinetics and capillary interaction.Furthermore,the track-guided transportation system is applied to realize directed self-assembly of multiple PDMS building blocks for designated configuration,which increases the complexity and intelligence of self-assembly systems.展开更多
This review summarizes the self-assembly of block molecules forming unconventional two-dimensional(2D)periodic nanopatterns.Especially,we emphasize the structural evolution from simple columnar phases to complex 2D ti...This review summarizes the self-assembly of block molecules forming unconventional two-dimensional(2D)periodic nanopatterns.Especially,we emphasize the structural evolution from simple columnar phases to complex 2D tiling morphologies in soft materials including block copolymers,liquid crystals,giant molecules,etc.Then,the state-of-the-art nanofabrication technologies for making sophisticated nanostructures with specific functions via combining both bottom-up assembly and top-down lithography-based methods are discussed,highlighting the use of directed self-assembly processes.Finally,we provide our perspective on this area.By further increasing the complexity of block molecules and the designability of lithography,low-dimensional ordered morphologies will be particularly promising for further application in nanotechnology.展开更多
By introduction of a new Fe(L^(1))_(2)spin-crossover(SCO)unit into the polynuclear system,a nano-scale Fe4(L^(2))_(4)molecular square architecture is designed through coordination-directed self-assembly strategy.Both ...By introduction of a new Fe(L^(1))_(2)spin-crossover(SCO)unit into the polynuclear system,a nano-scale Fe4(L^(2))_(4)molecular square architecture is designed through coordination-directed self-assembly strategy.Both the mononuclear Fe(L^(1))_(2)and tetranuclear Fe4(L^(2))_(4)complexes have bee门structurally confirmed by 1H nuclear magnetic resonance(NMR),electrospray ionization time-of-flight mass spectrometry(ESI-TOF-MS),and temperature-dependent single crystal X-ray diffraction studies.Variable-temperature magnetic susceptibility measurements reveal the presence of an abrupt SCO behavior with a thermal hysteresis width of 4K for Fe(L^(1))_(2).By clear contrast,Fe4(L^(2))_(4)undergoes a gradual spin transition behavior with enlarged thermal hysteresis width and higher spin transition temperature.展开更多
Long-range ordered nanostructures are prepared in the poly（styrene）-block-poly（e-caprolactone） diblock copolymer thin films using micromolding. We evaluated the change in crystallinity based on grazing-incidence X...Long-range ordered nanostructures are prepared in the poly（styrene）-block-poly（e-caprolactone） diblock copolymer thin films using micromolding. We evaluated the change in crystallinity based on grazing-incidence X-ray diffraction and proved that the crystallinity increased with the decrease of the mold size. This means that ordered nanostructures with atomic length scale order can be adjusted by tuning the mesoscale confinement. The inherent mechanism was the cooperation of geometric confinement, microphase structure and surface-induced ordering of PS-b-PCL in the melt, which paved the way for the subsequent crystal growth. These findings establish a route to promote the cost-effective nanofabrication by combining the mature microfabrication technique with the emerging directed self-assembly of block copolymers.展开更多
文摘Directed self-assembly(DSA)emerges as one of the most promising new patterning techniques for single digit miniaturization and next generation lithography.DSA achieves high-resolution patterning by molecular assembly that circumvents the diffraction limit of conventional photolithography.Recently,the International Roadmap for Devices and Systems listed DSA as one of the advanced lithography techniques for the fabrication of 3-5 nm technology node devices.DSA can be combined with other lithography techniques,such as extreme ultra violet(EUV)and 193 nm immersion(193i),to further enhance the patterning resolution and the device density.So far,DSA has demonstrated its superior ability for the fabrication of nanoscale devices,such as fin field effect transistor and bit pattern media,offering a variety of configurations for high-density integration and low-cost manufacturing.Over 1 T in-2 device density can be achieved either by direct templating or coupled with nanoimprinting to improve the throughput.The development of high x block copolymer further enhances the patterning resolution of DSA.In addition to its superiority in high-resolution patterning,the implementation ofDSA on a 300 mm pivot line fully demonstrates its potential for large-scale,high-throughput,and cost-effective manufacturing in industrial environment.
基金the support from the University of South Carolina
文摘Helical hierarchy found in biomolecules like cellulose,chitin,and collagen underpins the remarkable mechanical strength and vibrant colors observed in living organisms.This study advances the integration of helical/chiral assembly and 3D printing technology,providing precise spatial control over chiral nano/microstructures of rod-shaped colloidal nanoparticles in intricate geometries.We designed reactive chiral inks based on cellulose nanocrystal(CNC)suspensions and acrylamide monomers,enabling the chiral assembly at nano/microscale,beyond the resolution seen in printed materials.We employed a range of complementary techniques including Orthogonal Superposition rheometry and in situ rheo-optic measurements under steady shear rate conditions.These techniques help us to understand the nature of the nonlinear flow behavior of the chiral inks,and directly probe the flow-induced microstructural dynamics and phase transitions at constant shear rates,as well as their post-flow relaxation.Furthermore,we analyzed the photo-curing process to identify key parameters affecting gelation kinetics and structural integrity of the printed object within the supporting bath.These insights into the interplay between the chiral inks self-assembly dynamics,3D printing flow kinematics and photopolymerization kinetics provide a roadmap to direct the out-of-equilibrium arrangement of CNC particles in the 3D printed filaments,ranging from uniform nematic to 3D concentric chiral structures with controlled pitch length,as well as random orientation of chiral domains.Our biomimetic approach can pave the way for the creation of materials with superior mechanical properties or programable photonic responses that arise from 3D nano/microstructure and can be translated into larger scale 3D printed designs.
文摘We consider the inverse problem of finding guiding pattern shapes that result in desired self-assembly morphologies of block copolymer melts.Specifically,we model polymer selfassembly using the self-consistent field theory and derive,in a non-parametric setting,the sensitivity of the dissimilarity between the desired and the actual morphologies to arbitrary perturbations in the guiding pattern shape.The sensitivity is then used for the optimization of the confining pattern shapes such that the dissimilarity between the desired and the actual morphologies is minimized.The efficiency and robustness of the proposed gradient-based algorithm are demonstrated in a number of examples related to templating vertical interconnect accesses(VIA).
基金supported by the National Natural Science Foundation of China(Nos.52122315,21972008)Beijing Nova Program(No.Z201100006820021).
文摘Wettability transition is a significant responsive mechanism which is widely applied to construct smart materials and systems.The broad-spectrum responsiveness of the wettability transition makes it a promising way to expand innovative applications.Here,we develop a track-guided self-transportation system mediated by sequential wettability transition accompanied with capillary transportation.Alkaline fuel is loaded into polydimethylsiloxane(PDMS)cuboid to trigger the wettability transition of distributed superhydrophobic tracks laid in shallow water.After the wettability transition,the induced capillary force can propel the repetitive track-to-track transportation of PDMS.Importantly,the spacing between adjacent tracks is rationally designed based on multiple factors including threshold of wettability transition,diffusion kinetics and capillary interaction.Furthermore,the track-guided transportation system is applied to realize directed self-assembly of multiple PDMS building blocks for designated configuration,which increases the complexity and intelligence of self-assembly systems.
基金financially supported by the National Natural Science Foundation of China (Nos. 21925102, 21991132, 92056118 and 22101010)the financial support from the National Key R&D Program of China (No. 2018YFB0703702)Beijing National Laboratory for Molecular Sciences (No. BNLMS-CXXM-202006)
文摘This review summarizes the self-assembly of block molecules forming unconventional two-dimensional(2D)periodic nanopatterns.Especially,we emphasize the structural evolution from simple columnar phases to complex 2D tiling morphologies in soft materials including block copolymers,liquid crystals,giant molecules,etc.Then,the state-of-the-art nanofabrication technologies for making sophisticated nanostructures with specific functions via combining both bottom-up assembly and top-down lithography-based methods are discussed,highlighting the use of directed self-assembly processes.Finally,we provide our perspective on this area.By further increasing the complexity of block molecules and the designability of lithography,low-dimensional ordered morphologies will be particularly promising for further application in nanotechnology.
基金the National Natural Science Foundation of China(Nos.21825107,21971237,21801241)the Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDB20000000).
文摘By introduction of a new Fe(L^(1))_(2)spin-crossover(SCO)unit into the polynuclear system,a nano-scale Fe4(L^(2))_(4)molecular square architecture is designed through coordination-directed self-assembly strategy.Both the mononuclear Fe(L^(1))_(2)and tetranuclear Fe4(L^(2))_(4)complexes have bee门structurally confirmed by 1H nuclear magnetic resonance(NMR),electrospray ionization time-of-flight mass spectrometry(ESI-TOF-MS),and temperature-dependent single crystal X-ray diffraction studies.Variable-temperature magnetic susceptibility measurements reveal the presence of an abrupt SCO behavior with a thermal hysteresis width of 4K for Fe(L^(1))_(2).By clear contrast,Fe4(L^(2))_(4)undergoes a gradual spin transition behavior with enlarged thermal hysteresis width and higher spin transition temperature.
基金financially supported by the National Natural Science Foundation of China(Nos.21274148 and 21074135)The experimental setup at the Nanofocus Endstation of MiNaXS was funded by the German Federal Ministry of Education and Research(projects BMBF 05KS7FK1 and 05K10FK3)
文摘Long-range ordered nanostructures are prepared in the poly（styrene）-block-poly（e-caprolactone） diblock copolymer thin films using micromolding. We evaluated the change in crystallinity based on grazing-incidence X-ray diffraction and proved that the crystallinity increased with the decrease of the mold size. This means that ordered nanostructures with atomic length scale order can be adjusted by tuning the mesoscale confinement. The inherent mechanism was the cooperation of geometric confinement, microphase structure and surface-induced ordering of PS-b-PCL in the melt, which paved the way for the subsequent crystal growth. These findings establish a route to promote the cost-effective nanofabrication by combining the mature microfabrication technique with the emerging directed self-assembly of block copolymers.
