利用试验设计方法(design of experiment,DOE),以不同配方的划片刀划切砷化镓晶圆,并检测其正、背、侧面的崩裂尺寸,找出划片刀配方对砷化镓晶圆切割崩裂尺寸的影响规律。研究表明:划片刀的磨料粒度与砷化镓晶圆切割质量密切相关,即磨...利用试验设计方法(design of experiment,DOE),以不同配方的划片刀划切砷化镓晶圆,并检测其正、背、侧面的崩裂尺寸,找出划片刀配方对砷化镓晶圆切割崩裂尺寸的影响规律。研究表明:划片刀的磨料粒度与砷化镓晶圆切割质量密切相关,即磨料粒度越细,正、背、侧面崩裂尺寸越小;而磨料浓度和结合剂强度与砷化镓晶圆正、背、侧面的切割质量相关性并不显著。可通过缩小磨粒尺寸的方式提高划切质量,并视情况调整磨料浓度和结合剂强度。展开更多
In the recent years, the light sensitive resin has be en greatly improved. Its application includes rapid prototyping, bonding, protec tive coating and sealing. A new application to using light sensitive resin inste a...In the recent years, the light sensitive resin has be en greatly improved. Its application includes rapid prototyping, bonding, protec tive coating and sealing. A new application to using light sensitive resin inste ad of heat sensitive resin as bonding material in dicing blade is being progress ed by authors. This paper discusses the way in which the mechanical feature of t he new kinds of dicing blades had been greatly improved via adding whisker into light sensitive resin. Considering the enhancing function of whisker in length d irection is greater than that in diameter direction, an electric field was appli ed to make the direction of whisker in resin along with the direction of the load of dicing blade. In the electric field, a whisker in the resin is swerved to the direction of the electric force before the resin is solidified by ultravi olet radiation. The result shows that controlling the direction of whisker in th e resin by applying an electric field can finally greatly improve the mechanical property of dicing blade that can be used in processing the semi-conduct.展开更多
文摘利用试验设计方法(design of experiment,DOE),以不同配方的划片刀划切砷化镓晶圆,并检测其正、背、侧面的崩裂尺寸,找出划片刀配方对砷化镓晶圆切割崩裂尺寸的影响规律。研究表明:划片刀的磨料粒度与砷化镓晶圆切割质量密切相关,即磨料粒度越细,正、背、侧面崩裂尺寸越小;而磨料浓度和结合剂强度与砷化镓晶圆正、背、侧面的切割质量相关性并不显著。可通过缩小磨粒尺寸的方式提高划切质量,并视情况调整磨料浓度和结合剂强度。
文摘In the recent years, the light sensitive resin has be en greatly improved. Its application includes rapid prototyping, bonding, protec tive coating and sealing. A new application to using light sensitive resin inste ad of heat sensitive resin as bonding material in dicing blade is being progress ed by authors. This paper discusses the way in which the mechanical feature of t he new kinds of dicing blades had been greatly improved via adding whisker into light sensitive resin. Considering the enhancing function of whisker in length d irection is greater than that in diameter direction, an electric field was appli ed to make the direction of whisker in resin along with the direction of the load of dicing blade. In the electric field, a whisker in the resin is swerved to the direction of the electric force before the resin is solidified by ultravi olet radiation. The result shows that controlling the direction of whisker in th e resin by applying an electric field can finally greatly improve the mechanical property of dicing blade that can be used in processing the semi-conduct.
