A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reach...A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.展开更多
基于反馈式正弦波振荡器原理,设计出一款适合于UHF波段的高稳频型射频振荡器,本设计使用了高Q值选频技术,利用回路的谐振特性设计出多级的选频结构。振荡器输出频率范围:400 MHz^720 MHz,输出带宽大于300 MHz,属宽带射频振荡器。测试结...基于反馈式正弦波振荡器原理,设计出一款适合于UHF波段的高稳频型射频振荡器,本设计使用了高Q值选频技术,利用回路的谐振特性设计出多级的选频结构。振荡器输出频率范围:400 MHz^720 MHz,输出带宽大于300 MHz,属宽带射频振荡器。测试结果表明,在可用频段范围内,振荡器输出增益波动低于1 d B,输入驻波比VSWR<1.5 d B,输出驻波比VSWR<1.7 d B;中心频率f0=510 MHz时:频偏Δf=1 k Hz处,相位噪声PN=-77.9 d Bc/Hz;频偏Δf=10 k Hz处,相位噪声PN=-95.8 d Bc/Hz;频偏Δf=100 k Hz处,相位噪声PN=-140.3 d Bc/Hz;当频偏继续增加时,相位噪声呈指数下降。本设计可满足电视系统、无线对讲机系统、无线遥控系统等多种主流射频领域的应用要求。展开更多
基金The National High Technology Research and Development Program of China (863Program)(No.2002AA812038)the National Defense Pre-Research Support Program (No.41308050109)
文摘A novel closed-loop control strategy of a silicon microgyroscope （SMG） is proposed. The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than l0 000. Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits. Both single side driving and sensing methods are used to simplify the drive circuit. These dual channel decomposition and reconstruction closed loops are applied in sense modes. The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases. Under the condition of a scale factor of 9. 6 mV/（（°） .s）, in a full measurement range of±300 （°）/s, the zero bias stability reaches 28 （°）/h with a nonlinear coefficient of 400 × 10^-6 and a simulated bandwidth of more than 100 Hz. The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.
文摘基于反馈式正弦波振荡器原理,设计出一款适合于UHF波段的高稳频型射频振荡器,本设计使用了高Q值选频技术,利用回路的谐振特性设计出多级的选频结构。振荡器输出频率范围:400 MHz^720 MHz,输出带宽大于300 MHz,属宽带射频振荡器。测试结果表明,在可用频段范围内,振荡器输出增益波动低于1 d B,输入驻波比VSWR<1.5 d B,输出驻波比VSWR<1.7 d B;中心频率f0=510 MHz时:频偏Δf=1 k Hz处,相位噪声PN=-77.9 d Bc/Hz;频偏Δf=10 k Hz处,相位噪声PN=-95.8 d Bc/Hz;频偏Δf=100 k Hz处,相位噪声PN=-140.3 d Bc/Hz;当频偏继续增加时,相位噪声呈指数下降。本设计可满足电视系统、无线对讲机系统、无线遥控系统等多种主流射频领域的应用要求。
