摘要
所设计的硅微陀螺仪工作在10Pa,品质因素达到3000,采用CAN金属壳封装形式,测控线路采用闭环自激驱动,力反馈式闭环检测方式。驱动采用单边驱动单边检测,尽量使线路简化;检测采用双重分解和重构回路。测试结果表明:有用信号和正交信号实现很好的相位解耦,互不影响。在实现标度因素10mV/(°)S-1的情况下,零偏稳定性已达到了60°/h;线性度已达到了400ppm;带宽仿真达到150Hz;这较以前设计的空气下闭驱开检方式下的硅微陀螺性能提高了近2个数量级。
The quality factor of Silicon Microgyroscope sealed with CAN mental package in this paper working under the air pressure of 10 Pa is near 3000. Self oscillating and closed loop methods are adopted in measure and control circuit. Single side driving and sensing methods are used to simplify the whole circuit. Two channel decomposition and reconstruction closed loops are applied. The testing results demonstrate that the useful and quarduare signal will not interact because of their phase decoupling. Under the condition of the scale factor of 10 mv/（°）S^-1 , the zero bias stability attains 60°/h with linearity coefficient of 400 ppm and simulated bandwidth of 150 Hz, which has been improved two orders of magnitude better than that under the condition of atmospheric pressure.
出处
《传感技术学报》
CAS
CSCD
北大核心
2008年第2期241-243,共3页
Chinese Journal of Sensors and Actuators
基金
"八六三"国家高科技研究发展计划资助项目(2002AA812038)
关键词
硅微陀螺仪
自激驱动
双闭环检测
标度因素
零偏稳定性
silicon microgyroscope
self oscillating
double closed loop
scale factor
zero bias stability
