SmCo based films with excellent intrinsic magnetic properties have promising applications in micro-electro-mechanical system(MEMS).However,due to the complexity of phase composition and uncontrollable crystallization ...SmCo based films with excellent intrinsic magnetic properties have promising applications in micro-electro-mechanical system(MEMS).However,due to the complexity of phase composition and uncontrollable crystallization degree of SmCo hard magnetic phase in the film,both the coercivity(Hc)and remanence(Mr)of films are difficult to enhance simultaneously.In this paper,SmCo based films were deposited with a Cr underlayer and capping layer on single crystal Si substrates via magnetron sputtering process.The effects of annealing parameters and Sm/Co atomic ratio on the phase structure and coercivity of films are discussed.By adjusting the Sm/Co atomic ratio from 1:5 to 1:4,Co soft magnetic phase disappears and the single phase SmCo5 is obtained,leading to the increase of coercivity of the films from 30 to 34 kOe.The influence of deposition temperature and Cu doping on magnetic properties of SmCo based films was investigated.When the deposition temperature increases from room temperature to 250℃,the coercivity will further increase from 34 to 51 kOe.However,a severe kink is observed in the demagnetization curves due to the poor exchanged coupling.An analysis of transmission electron microscopy(TEM)confirms that the average size of non-hard magnetic amorphous phase exceeds the effective exchanged coupling length of SmCo5,which contributes to the decoupling and low remanence ratio.Therefore,doping Cu and applying a post-annealing process can significantly improve the crystallization degree of the films.Both the coercivity and the remanence ratio of the demagnetization curves are greatly enhanced.We propose a plausible strategy to prepare the SmCo based films with high coercivity and remanence ratio by temperature and chemical optimization,which can be utilized in high performed MEMS devices.展开更多
In this work, a direct green solid-phase reduction method for the fabrication of large yield of ordered phase Fe-Pt alloy nanoparticles was reported, in which inorganic salts were used as metal precursors and H_2-cont...In this work, a direct green solid-phase reduction method for the fabrication of large yield of ordered phase Fe-Pt alloy nanoparticles was reported, in which inorganic salts were used as metal precursors and H_2-containing atmosphere was used as reducer. Utilizing this method, the composition and chemical ordered phase, such as L1_2-Fe_3 Pt, L1_2-FePt_3, and L1_0-FePt phases can be easily achieved by one step reaction. The synthesized nanoparticles have clean surface because no organic precursors, no organic solutions or organic surfactants/ligands were used. Their magnetic performance and the formation mechanism of Fe-Pt alloy nanoparticles were also investigated. This strategy can be applied to synthesize many other types of alloy nanoparticles with desired composition and necessary crystal structure, which can be used for a variety of practical applications, such as in magnetism and catalyst research fields.展开更多
基金Project supported by the National Key R&D Program of China(2022YFB3505700,2022YFB3807900)National Natural Science Foundation of China(51901079)+2 种基金R&D(Research and Development)Plan in Key Areas of Guangdong Province(SDZX2021002,212021032611700001)Natural Science Foundation of Guangdong Province(2020A1515010736,2021A1515010451)the Guangzhou Municipal Science and Technology Program(202007020008)。
文摘SmCo based films with excellent intrinsic magnetic properties have promising applications in micro-electro-mechanical system(MEMS).However,due to the complexity of phase composition and uncontrollable crystallization degree of SmCo hard magnetic phase in the film,both the coercivity(Hc)and remanence(Mr)of films are difficult to enhance simultaneously.In this paper,SmCo based films were deposited with a Cr underlayer and capping layer on single crystal Si substrates via magnetron sputtering process.The effects of annealing parameters and Sm/Co atomic ratio on the phase structure and coercivity of films are discussed.By adjusting the Sm/Co atomic ratio from 1:5 to 1:4,Co soft magnetic phase disappears and the single phase SmCo5 is obtained,leading to the increase of coercivity of the films from 30 to 34 kOe.The influence of deposition temperature and Cu doping on magnetic properties of SmCo based films was investigated.When the deposition temperature increases from room temperature to 250℃,the coercivity will further increase from 34 to 51 kOe.However,a severe kink is observed in the demagnetization curves due to the poor exchanged coupling.An analysis of transmission electron microscopy(TEM)confirms that the average size of non-hard magnetic amorphous phase exceeds the effective exchanged coupling length of SmCo5,which contributes to the decoupling and low remanence ratio.Therefore,doping Cu and applying a post-annealing process can significantly improve the crystallization degree of the films.Both the coercivity and the remanence ratio of the demagnetization curves are greatly enhanced.We propose a plausible strategy to prepare the SmCo based films with high coercivity and remanence ratio by temperature and chemical optimization,which can be utilized in high performed MEMS devices.
基金financially supported by the National Natural Science Foundation of China (Grant Nos.51772220,51772219,51771095,51422106)Zhejiang Provincial Natural Science Foundation of China (No.D19E010001)the National Basic Research Program of China (Grant No.2014CB643702)
文摘In this work, a direct green solid-phase reduction method for the fabrication of large yield of ordered phase Fe-Pt alloy nanoparticles was reported, in which inorganic salts were used as metal precursors and H_2-containing atmosphere was used as reducer. Utilizing this method, the composition and chemical ordered phase, such as L1_2-Fe_3 Pt, L1_2-FePt_3, and L1_0-FePt phases can be easily achieved by one step reaction. The synthesized nanoparticles have clean surface because no organic precursors, no organic solutions or organic surfactants/ligands were used. Their magnetic performance and the formation mechanism of Fe-Pt alloy nanoparticles were also investigated. This strategy can be applied to synthesize many other types of alloy nanoparticles with desired composition and necessary crystal structure, which can be used for a variety of practical applications, such as in magnetism and catalyst research fields.
