提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提...提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提出了三对全金属Al-W层作为布拉格声学反射层的FBAR,采用AlN作为压电层,制备出了固态装配型FBAR传感器。通过淀积不同厚度Al层顶电极,对器件的质量灵敏度进行了分析,得到质量传感器串联谐振频率在2.8GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。展开更多
介绍了一种针对于生物传感应用的薄膜体声波谐振(thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(能够达到几兆赫兹),同时具有较大的品质因数,基于这种器件的质量传感器具有非常高的质量灵敏度。...介绍了一种针对于生物传感应用的薄膜体声波谐振(thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(能够达到几兆赫兹),同时具有较大的品质因数,基于这种器件的质量传感器具有非常高的质量灵敏度。首次提出了三对全金属的Al-W层作为布拉格声学反射层的FBAR,制备出了固态装配型的FBAR传感器。通过淀积不同厚度Al层顶电极分析了器件的质量灵敏度,仿真得到的质量传感器串联谐振频率在2.8 GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。展开更多
A high-performance low-powerΣΔanalog-to-digital converter（ADC） for digital audio applications is described.It consists of a 2-1 cascadedΣΔmodulator and a decimation filter.Various design optimizations are implem...A high-performance low-powerΣΔanalog-to-digital converter（ADC） for digital audio applications is described.It consists of a 2-1 cascadedΣΔmodulator and a decimation filter.Various design optimizations are implemented in the system design,circuit implementation and layout design,including a high-overload-level coefficient-optimized modulator architecture,a power-efficient class A/AB operational transconductance amplifier,as well as a multi-stage decimation filter conserving area and power consumption.The ADC is implemented in the SMIC 0.18-μm CMOS mixed-signal process.The experimental chip achieves a peak signal-to-noise-plus-distortion ratio of 90 dB and a dynamic range of 94 dB over 22.05-kHz audio band and occupies 2.1 mm^2,which dissipates only 2.1 mA quiescent current in the analog circuits.展开更多
文摘提出了一种针对于生物传感应用的薄膜体声波谐振(Thin film bulk acoustic resonator,FBAR)质量传感器。薄膜体声波谐振器谐振频率非常高(GHz数量级),同时具有很高的品质因数,因此基于这种器件的质量传感器具有非常高的质量灵敏度。提出了三对全金属Al-W层作为布拉格声学反射层的FBAR,采用AlN作为压电层,制备出了固态装配型FBAR传感器。通过淀积不同厚度Al层顶电极,对器件的质量灵敏度进行了分析,得到质量传感器串联谐振频率在2.8GHz附近,质量响应度达到5×10-4ng/Hz/cm2,可以实现分子量级的质量传感。
文摘A high-performance low-powerΣΔanalog-to-digital converter（ADC） for digital audio applications is described.It consists of a 2-1 cascadedΣΔmodulator and a decimation filter.Various design optimizations are implemented in the system design,circuit implementation and layout design,including a high-overload-level coefficient-optimized modulator architecture,a power-efficient class A/AB operational transconductance amplifier,as well as a multi-stage decimation filter conserving area and power consumption.The ADC is implemented in the SMIC 0.18-μm CMOS mixed-signal process.The experimental chip achieves a peak signal-to-noise-plus-distortion ratio of 90 dB and a dynamic range of 94 dB over 22.05-kHz audio band and occupies 2.1 mm^2,which dissipates only 2.1 mA quiescent current in the analog circuits.
