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硬质合金球上纳米金刚石膜的形貌与力学性能 被引量:1
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作者 张廷飞 芶立 陈虹 《人工晶体学报》 EI CAS CSCD 北大核心 2013年第6期1016-1020,共5页
采用微波等离子体化学气相沉积法在直径1~5 mm硬质合金球体上沉积了5~20μm厚的纳米金刚石膜。通过扫描电子显微镜、原子力显微镜和拉曼光谱对样品的表面形貌、膜厚均匀性和成份进行了表征。沉积膜表面呈现纳米金刚石典型"菜花&q... 采用微波等离子体化学气相沉积法在直径1~5 mm硬质合金球体上沉积了5~20μm厚的纳米金刚石膜。通过扫描电子显微镜、原子力显微镜和拉曼光谱对样品的表面形貌、膜厚均匀性和成份进行了表征。沉积膜表面呈现纳米金刚石典型"菜花"结构,晶粒度为10~20 nm,膜厚均匀,表面粗糙度随沉积膜厚度增加而增大。采用纳米压痕仪测试沉积膜硬度和弹性模量,沉积膜硬度接近40 GPa,弹性模量约为500 GPa。 展开更多
关键词 固体润滑 纳米金刚石 纳米压痕
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Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD 被引量:1
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作者 陈虹 芶立 《Plasma Science and Technology》 SCIE EI CAS CSCD 2015年第12期1038-1042,共5页
Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing.The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis... Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing.The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis.The hardness of the coating is 20-40 GPa tested by nanoindentation,which is higher than that of tungsten carbide and silicon nitride substrates.The coating around the sphere observed from the Micro CT images is uniform with a thickness of 12 μm. 展开更多
关键词 diamond Diamond nitride tungsten spheres carbide modulus roughness hardness graphite
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