The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the ...The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.展开更多
文摘The hydrogenated diamond like carbon(DLC) films were formed on conductive glass substrate by deposition in DMF using a pulse modulated source. The X ray photoelectron spectroscopy results of the films showed that the main composition of the films are carbon. The Raman and IR spectra indicated the existence of hydrogen in form of sp 3 C in the film. From the Raman spectra indicated the formation of DLC in most regions of the film and also possible diamond deposits. The films showed high transmission ratio (>70%) in 330～2000 nm and electrical resistivity of 10 10 Ω·cm.
