Ferroelectric ceramics such as BaTiO<sub>3</sub>, PbTiO<sub>3</sub> and PLZI has been widely used in piezo-and pyroelectric devices. Ferroelectric thin films can be integrated with large-scale ...Ferroelectric ceramics such as BaTiO<sub>3</sub>, PbTiO<sub>3</sub> and PLZI has been widely used in piezo-and pyroelectric devices. Ferroelectric thin films can be integrated with large-scale inte-grated circuits, so the films can be used for many kinds of microelectronic and electroopticdevices, such as NVFRAM, SAW devices, optical switches and optical展开更多
基金Project supported by the National Natural Science Foundation of Chinapartially by the Electronic Material Research Laboratory of Xi'an Jiaotong University.
文摘Ferroelectric ceramics such as BaTiO<sub>3</sub>, PbTiO<sub>3</sub> and PLZI has been widely used in piezo-and pyroelectric devices. Ferroelectric thin films can be integrated with large-scale inte-grated circuits, so the films can be used for many kinds of microelectronic and electroopticdevices, such as NVFRAM, SAW devices, optical switches and optical
