摘要
采用金属有机物热分解（ＭＯＤ）法，通过对原料的提纯和合成工艺的优化，消除原料中的微量杂质，控制环境温度，从而获得了透明、稳定的锆钦酸铅先体溶液．锆铁酸铅先体溶液经过多次成膜，在Ｐｔ／ＳｉＯ２／Ｓｉ基片上制备出厚度为０．６ｕｍ，均匀、无裂纹、无针孔的薄膜．经５５０℃保温处理后，得到假立方晶系的钙钦矿结构的薄膜．借助扫描电镜形貌分析表明，其晶粒大小约为２～３μｍ．
A PZT thin film were prepared by MOD technology.The impurities in raw materials were eliminated on the optimzation of synthesis--technology precursors. Throuhg con'trolling the air humidity while synthesizing,synthesizing PZT solution was transparentand very stable.Dues crack and pore--free PZT thin films were prefered on Pt/Sio2/Sisubstrated by multi--spin--coating and between in the range of 400℃￣550℃.Thepure Perovskite PZT films with thickness of 520 urn and grain size of 2--3μm were identi'fied by XRD and SEM.
出处
《西安工业学院学报》
CAS
1994年第4期281-286,共6页
Journal of Xi'an Institute of Technology
关键词
锆钛酸铅
铁电薄膜
钙钛矿
MOD lead--zirconate-titanate
ferroelectric thin film
perovskite
