I. INTRODUCTIONIon-implantation technique is a new technique developed in recent years. It was first applied to semiconductor devices in the 1960s, and then widespread into many fields such as solid state physics and ...I. INTRODUCTIONIon-implantation technique is a new technique developed in recent years. It was first applied to semiconductor devices in the 1960s, and then widespread into many fields such as solid state physics and material science. However, only a展开更多
基金Project supported by the National Natural Science Foundation of China.
文摘I. INTRODUCTIONIon-implantation technique is a new technique developed in recent years. It was first applied to semiconductor devices in the 1960s, and then widespread into many fields such as solid state physics and material science. However, only a
