摘要
卷对卷电子束蒸发作为优秀的高阻隔膜制备工艺技术,兼顾了制备薄膜的致密性和高速成膜,受到国外各大高阻隔膜产商的青睐,然而,国内的卷对卷电子束蒸发高阻隔膜产业尚未形成,相关的研究也远落后于国外。本文对电子枪技术的发展、应用现状,以及对卷对卷电子束蒸发技术进行了介绍,并对卷对卷电子束制备高阻隔膜的关键技术工艺的现状进行了综述,对国产卷对卷电子束蒸镀高阻隔膜的发展进行了展望。
As an excellent technique for preparation of high barrier films, roll-to-roll electron beam evaporation has the advantages of film compactness and high-speed film formation, and is favored by the foreign producers of high barrier films. While the domestic manu-facturer for high barrier films by roll-to-roll electron beam evaporation has not been well devel-oped, and the relevant research lags behind foreign countries. In this paper, the development and application status of electron gun and the roll-to-roll electron beam evaporation technique are in-troduced. The key technical parts and the domestic roll-to-roll electron beam evaporation system for preparing high barrier films are reviewed and prospected.
出处
《材料科学》
CAS
2022年第9期912-925,共14页
Material Sciences
