摘要
为解决光波导器件耦合效率低、难以实现的问题,本文开展了集成光波导耦合技术的研究,设计了一种均匀光栅耦合器,采用时域有限差分法对光栅耦合器进行了仿真和优化。计算结果:光栅耦合器在耦合角度 = 20˚,刻蚀宽度w = 300 nm,刻蚀深度e = 70 nm,周期p = 660 nm时,该种光栅耦合器耦合效率达到57.2%。本文工作可为光栅耦合器的设计提供参考。
In order to solve the problem of lowcoupling efficiency and difficult realization of optical waveguide devices, wecarried out the research of integrated optical waveguide coupling technology inthis paper, designed a uniform grating coupler, simulated and optimized thegrating coupler using finite difference time domain method. Calculation result:when the coupling angle = 20˚, the etching width w = 300 nm, the etching depthe = 70 nm, and the period p = 660 nm, the coupling efficiency of the gratingcoupler reaches 57.2%. The work of this paper can provide reference for thedesign of grating coupler.
出处
《传感器技术与应用》
2022年第1期31-36,共6页
Journal of Sensor Technology and Application
