摘要
通过对凸非球面检测过程中各部分元件对波面影响情况的分析,导出了球面计算全息图各衍射级次空间频率和滤波光阑最小孔径的计算公式, 证明了用球面计算全息图检测凸非球面可以减小计算全息图的特征尺寸,降低计算全息图的制作精度。根据导出公式选择合适的计算全息图的位相函数和滤波光阑孔径,以充分滤掉不需要的级次,实现凸非球面的全孔径检测。具体设计实例与实验结果表明,当选择直径为0.2mm的光阑和线宽在40靘到800靘之间变化的计算全息图时,实现了对孔径110mm, 球面半径500mm, 非球面系数为1的凸非球面镜的全孔径检测,这与分析结果完全吻合。
Two simple approximative analytical expressions for spatial frequency of various diffraction orders of spherical Computer-Generated Hologram (CGH) and minimal aperture of filtering diaphragm are derived through analyzing influence of various elements on wave-front during measuring process for convex aspheric surface. It is demonstrated that measurement of aspheric surface with spherical CGH can reduce the characteristic sizes of CGH, thus redusing the preparation precision of CGH. Suitable phase function of CGH and filtering diaphragm aperture are selected for fully filtering undesirable orders according to the derived expressions, thus full-aperture measurement of convex aspheric surface is realized. The practical design examples and the experimental results show that when select diaphragm with diameter of 0.2mm and CGHs with line width varying in the range of 40~800micron, the full-aperture measurement of convex aspheric surface with an aperture of 110mm, spherical radius of 500mm and aspheric coefficient of 1 is performed. The measurement result is coincident with the analysis result.
出处
《光电工程》
CAS
CSCD
北大核心
2004年第7期38-41,共4页
Opto-Electronic Engineering
基金
国家自然科学基金资助项目(60078006)
关键词
计算全息图
凸非球面
非球面检测
Computer-generated holograms
Convex aspheric surface
Aspheric surface testing
