摘要
This paper briefly introduces the characteristics of electron beam physical vapor depo-sition (EBPVD) technique and the whole process of preparing micro--layer compositelaminate. And several major influencing factors are presented and discussed. It wasfound that residual gas pressure should be low enough to guarantee the unobstructedtransporfation of vapor steam and electron beam; the evaporation method and evapo-ration speed are up to the different vapor pressure deficit of compositions of raw mate-rials; and the substrate temperature could have great influence on the microstructureof the micro--layer laminates.
This paper briefly introduces the characteristics of electron beam physical vapor depo-sition (EBPVD) technique and the whole process of preparing micro--layer compositelaminate. And several major influencing factors are presented and discussed. It wasfound that residual gas pressure should be low enough to guarantee the unobstructedtransporfation of vapor steam and electron beam; the evaporation method and evapo-ration speed are up to the different vapor pressure deficit of compositions of raw mate-rials; and the substrate temperature could have great influence on the microstructureof the micro--layer laminates.
基金
This work was supported by the Natural Science Foundation of Heilongjiang Province(No.E01-07)
Postdoctoral Science Foundation of China(No.LB0047).
