摘要
设计并制作完成了一种基于压电陶瓷逆压电效应的纳米精度压电步进马达。根据其结构简化模型,推导出该压电纳米马达在脉冲电源作用下的运动特性表达式。编写软件,设定参数对压电马达的运动性能进行模拟,结果表明了马达的线性步进运动特点。设计光栅测试系统,对压电马达样机进行运动测试,试验结果证实了模拟结构的正确性。该类压电纳米马达具有可以实现连续步进位移,步进速度快,单步分辨率小,行程长和便于利用微机实现智能控制等特点。纳米马达的位移分辨率可以达到10nm,最快速度为0.6mm/s,最长行程为5cm。
A nanometer precision stepper piezoelectric motor has been designed and fabricated based on converse piezoelectric effect. From the simple model established from the motor's configuration, dynamic characteristic equations are deduced with pulses applied on the piezoelectric stack. The movement of the motor was simulated with some coefficients applied. The results of the simulation show that the motor is a linear stepper motor. A grating testing system was designed to test the piezoelectric motor. The experimental results prove that the simulations are true. This piezoelectric nanomotor can achieve serial step movement at higher speed with higher resolution in longer range, and it is easy to control by computer. The displacement resolution of the motor could be 10 nm at 0.6 mm/s in the range is 5 cm.
出处
《光学精密工程》
EI
CAS
CSCD
2004年第3期287-291,共5页
Optics and Precision Engineering
关键词
纳米马达
压电陶瓷
执行器
光栅计量系统
nanomotor
piezoelectric crystal
actuator
grating testing system
