摘要
本文介绍了碳系列薄膜、纳米多层及纳米复合超硬薄膜近年来所取得的研究成果 ,重点是氮化物纳米多层与复合超硬薄膜的研究状况 ,并对纳米多层膜在应用中存在的问题提出了解决的思路 。
The current achievements in superhard films were reviewed including diamond,diamond-like,c-BN,B-C-N,nano-multilayer and nano-composite films in the past several years.Specially,nano-multilayer and nano-composite films of nitride were introduced in detail.The problems of nano-multilayer films existed in practical applications were presented and the methods of solution were suggested.The perspective on the development of superhard films was given.
出处
《金属热处理》
CAS
CSCD
北大核心
2004年第4期2-5,共4页
Heat Treatment of Metals
基金
中国科学院兰州化学物理研究所固体润滑国家重点实验室项目 ( 0 1 0 3 )
关键词
硬度
超硬薄膜
纳米多层与复合薄膜
hardness
superhard films
nano-multilayer and nano-composite films
