摘要
综述了用硅烷试剂处理金属表面而形成的保护膜性能及结构的表面分析方法。详述了X射线光电子能谱、红外光谱、次级离子质谱、椭圆光谱、电化学阻抗谱等方法在硅烷处理金属表面过程中的应用 ,通过对膜形成的机制、膜的键合方式、膜结构、膜厚度以及膜的耐蚀性等方面的研究分析 ,探讨了它们对膜性能的影响 ,并用各种不同的参数表征了金属基材上硅烷膜的特性。同时指出了所述各种表面分析方法用于金属表面硅烷膜分析和检测的优点和不足之处 ,讨论了将各种表面分析技术联用起来以期得到更多有用的化学信息 ,以此可以指导硅烷化金属表面处理工艺过程。此外还提到了其他可用于金属表面硅烷膜性能的表征的分析技术 ,展望了金属表面硅烷膜分析的研究。
Surface analysis methods for structure and characters of silane film. on metal surface were reviewed in this paper. Many instrumental methods, such as XPS, ATR-FTIR, RA-FTIR, SIMS, ellipsometry, EIS and so on, were applied to characterizing different silane films on different metal base surfaces. According to the research on silane film formation mechanism, silane film state, silane film structure, silane film thickness, silane film corrosion resistance and so on, factors which affect silane film. properties were discussed. Various parameters were proposed for characterizing silane film. Merits and defects of various surface analysis methods were expressed. In order to acquire more chemical information, different surface analysis methods can be combined for detection at the same time. Regarding the results from these detection and analysis, new silane treatment technique for metal surface can be optimized and improved greatly. Some other kinds of surface analysis methods were also mentioned in this paper. More advanced researches in the field of silane film analysis on metal surface were prospected.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
2004年第4期495-498,共4页
Spectroscopy and Spectral Analysis
基金
重庆市科委应用基础研究基金 (2 0 0 0 60 4 1 )资助项目