摘要
简述了氟化钙(CaF_2)晶体的发展历史,总结其光学特性,介绍了氟化钙晶体的生长新工艺技术和发展。综述了氟化钙晶体在现代信息技术中的应用,特别对氟化钙晶体在紫外波段激光或光刻系统中的应用和发展状况作了重点说明,同时进一步指出了目前存在的问题,最后对氟化钙晶体的发展前景作了展望。
The development history of calcium fluoride (CaF2) crystals is introduced; its basic perforanmances and properties are summarized. New growth technology as well as the research and development of the crystals are briefly described. Emphasis is put on the application and development status of the crystals in laser and photolithography in the UV wavelength range, and the prospect of the crystals is put forward.
出处
《激光与光电子学进展》
CSCD
2003年第8期43-47,共5页
Laser & Optoelectronics Progress
基金
上海市科技发展基金(022261053)
