摘要
碳纳米管研究的不断发展为其与微机电系统(MEMS)的结合提供了可能,这种结合"Top-down"与"Bottom up"的方法是微米/纳米技术的一个发展趋势。介绍了碳纳米管的特性及其在MEMS上的潜在应用,综述了碳纳米管的制备方法以及与MEMS技术的兼容性,列举了目前一些碳纳米管与MEMS结合研究的典型,并对其发展趋势进行了分析。
The research progress of carbon nanotubes offers a wide range of possibilities for the combination of carbon nanotubes and MEMS. The method combining both'Top-down'and'Bottom-up'is the trend of micro-nano technology.The basic characteristics of carbon nanotubes and their potential applications to MEMS are introduced. The fabricating technology of the carbon nanotubes and their compatibility with MEMS are summarized.The examples for the current research combining the carbon nanotubes with MEMS are given, and its developing trend is also analyzed.
出处
《微细加工技术》
2004年第1期9-17,共9页
Microfabrication Technology
基金
高等学校博士学科点专项科研基金资助项目(2002003018)
