摘要
利用低能离子束技术,把甲烷(CH_4)气体离解,在石英和单晶硅片表面沉积类金刚石膜(DLC膜),研究了该膜在可见光区的光学特性与沉积参数的关系。在单晶硅太阳电池表面,沉积DLC膜作为减反膜及保护膜的研究,获得了有减反膜的单晶硅太阳电池效率比无减反膜电池效率提高了28%以上的结果。
Using the technique of low energy ion beam we have deposited the diamond-like carbon (DLC) films on quartz and single crystal silicon through dissociating CH_4. The relationship between the optical properties in the wave band of visible light and the parameters of film deposition, and the properties of DLC film on the silicon solar cell as the AR and protective coating are discussed. The efficiency of the single crystal silicon cell with AR coating increases by 28.2% compared to the one without AR coating.
出处
《真空科学与技术》
EI
CAS
CSCD
1992年第6期453-460,共8页
Vacuum Science and Technology
