摘要
铜材料X射线聚焦组合透镜是一种基于折射效应的X射线聚焦元件。简单介绍了组合透镜的设计理论研究结果,并据此对材料作了选择。针对铜材料组合透镜,分析了组合透镜结构参数、X射线工作波长的选择对组合透镜光学性能的影响。在此基础上,设计了组合透镜的结构参数,使其在硬X射线波段具有较好的聚焦性能,并能获得较高的焦斑强度。采用准LIGA技术制作了铜材料X射线组合透镜,给出了部分铜材料X射线组合透镜结构测量结果。
The compound X-ray lens is a novel refractive X-ray optical device. A brief introduction on its theoretical method is presented. The relationship between the parameters of Cu compound X-ray lens and its performance is analyzed. The compound X-ray lens presented is proposed for sub-micrometer focusing of high-energy X-rays (>5keV) to gain better focusing performance and transmission efficiency at the focal plane. A micro-fabrication technique called quasi-LIGA technology is used to manufacture the Cu compound lens. A brief description of the processing of the technique is given, and the characterizations of the structure of the compound lens by SEM are also shown.
出处
《光学技术》
EI
CAS
CSCD
2004年第1期20-23,共4页
Optical Technique
基金
国家自然科学基金资助项目(10174079)
浙江工业大学人才基金资助项目
关键词
铜材料X射线聚焦组合透镜
设计
制作
准LIGA技术
Cu compound X-ray refractive lens
structural parameters of the compound lens
quasi-LIGA technology
