摘要
利用振簧技术测量了不同退火状态下的nc-TiN/a-Si3N4超硬薄膜的Yong's模量和内耗随温度的变化关系.在280—300℃附近观察到一个弛豫内耗峰.随着退火温度的升高,该内耗峰逐渐减弱,而Young's模量变化不大.750℃退火后,该内耗峰消失,而模量却从未退火时的430 GPa激增至530 GPa.初步认为该内耗峰来源于非稳定界面的弛豫过程.
The vibrating reed technique is used to evaluate the Young's modulus and internal friction of nc-TiN/a-Si3N4 superhard films. A relaxation peak is observed around 280℃ in the as-received film. With increasing the annealing temperature, this peak weakens and the Young's modulus at room temperature changes slightly. After annealing at 750℃, this peak disappears while the modulus increases from the value of 430 GPa in the un-annealed status to a value of 530 GPa. This internal friction peak is suggested to be associated with the relaxation process of the unstable interface.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
2003年第11期1193-1196,共4页
Acta Metallurgica Sinica
基金
国家自然科学基金10274086
德国大众汽车基金I/77 192资助项目
