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离子束溅射技术制备高性能光通信带通滤光膜的研究 被引量:6

Synthesis and Characterizationof Band-Pass Filter Fabricated with Ion-Beam Sputtered Ta_2O_5 and SiO_2 Coatings for Optical Communication
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摘要 光通信以其传输速率高、信息容量大、保密性能好、抗干扰能力强等优点,在通信领域得到了广泛应用,是未来信息网络的主要通信方式。光通信的信息载体是光波,为了进一步提高光通信系统中光信号的传输质量,满足光通信系统的使用要求,对高性能的带通滤光膜进行了研制。采用离子束溅射技术,以Ta_2O_5和SiO_2作为镀膜材料,设计了含有12个谐振腔的带通滤光膜,分析并解决了耦合层膜厚监控的问题。制备的带通滤光膜在1528~1571 nm处插入损耗小于0.2 dB,1470~1521 nm和1578~1651 nm处透射隔离度大于40 dB,满足实际使用要求。 A novel type of high-performance band pass filter,comprising 12 Fabry-Perot(F-P)resonator cavities and fabricated from Ta2O5 and SiO2 layers synthesized by ion beam sputtering,was developed for optical communication.The influence of the deposition conditions,particularly the layer thickness,on the characteristics of the newly-developed band pass filter was investigated.The results show that the precision control of layer-thickness has a major impact.To be specific,the combination of optical and deposition time control-schemes was capable of precisely controlling the thickness of coupling layers,grown under the optimized conditions.The properties of the newly-designed stable band pass filter included:an insertion-loss of below 0.2 dB in 1479~1504 nm range and a transmission-isolation of above 40 dB in 1470~1521 nm and 1578~1651 nm ranges,satisfying well the stringent requirements of optical communication.
作者 石澎 张功 张于帅 王丽荣 Shi Peng;Zhang Gong;Zhang Yushuai;Wang Lirong(Zhongshan Torch Polytechnic,Zhongshan 528436,China;School of Optics and Electric Engineering,Changchun University of Science and Technology,Changchun 130022,China)
出处 《真空科学与技术学报》 EI CAS CSCD 北大核心 2019年第2期136-139,共4页 Chinese Journal of Vacuum Science and Technology
基金 吉林省重大科技攻关专项(20140203002GX) 广东省中山市科技局项目(2016B2182)
关键词 薄膜 带通滤光膜 谐振腔 耦合层 thin films band pass filter resonator coupling layers
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