摘要
随着MEMS集成度的提高,迫切需要有相应的CAD工具进行系统级的设计与模拟,由于MEMS器件的工作原理包含了多种能量的耦合,宏模型的建立成了系统级设计的“瓶颈”。模拟硬件描述语言(如VHDL-AMS)提供了一种有效的方法,即建立起表示MEMS器件动态特性的常微分方程和代数方程(DAE),然后对其描述,形成相应的库单元,利用现有电路分析软件进行系统级模拟。本文介绍了MEMS器件VHDL描述的过程,并给出了横向谐振器描述的例子。
The increasing integration of MEMS pushes the need of CAD tools for the design of system.In order to promote the establishment of reusable intellecture propery(IP)for MEMS ,the behavior analog hardware description language is used to describe system dynamical behavior characterized as coupled sets of ordinary differential and algebraic equations(DAEs ).Using macromodels of MEMS together with models of electronics,the system level simulation can be performed to predict global performance.This paper introduces the description of VHDL for MEMS devices and gives an example of a lateral resonator.
出处
《微纳电子技术》
CAS
2003年第5期33-36,44,共5页
Micronanoelectronic Technology
基金
国家高技术研究发展计划(863计划)重大资助项目(2002A-1-1)
