摘要
基于混合集成技术 ,设计并制作了具有RS2 32标准接口输出的压力 温度多功能传感器。该传感器由压力 温度复合敏感单元、R/V转换及前置放大、A/D转换、可编程RS2 32接口单元等构成。此外开发了传感器的数据采集与处理软件 ,通过软件对原传感器的误差进行软补偿 ,传感器的测量综合精度有所提高 ,在室温至 80℃的测量范围内零位温漂由 4 .4 % /℃降至 0 .2 % /℃。
A pressure temperature multifunction sensor with RS232 compute communication interface is introduced in this paper. A pressure temperature multifunction sensor, a R/V convertor, a preamplifier, a A/D convertor and programmed RS232 interface cell were integrated. Collecting and processing program for sensor output data were designed, by which the error of the sensor was compensated. Result shows that the precision of the sensor was improved, and the null temperature drift was reduced from 4.4%/℃ to 0.2%/℃。
出处
《微纳电子技术》
CAS
2003年第7期426-428,共3页
Micronanoelectronic Technology
基金
国家"8 63"计划 (2 0 0 2AA43 12 0 0 )资助项目