摘要
采用化学腐蚀及干法刻蚀相结合的技术制作PCR生物芯片的微反应腔 ,并在微反应腔上制作金属薄膜微型加热器和温度传感器 ,分析了微型加热器和温度传感器的特性 ,并给出扫描电子显微镜照片。实验证明Ni比较适合做温度传感器 ,NiCr是较好的微型加热器材料 。
The micro chamber of PCR biochip fabricated by wet chemistry etching and dry plasma etching. Then the metal membrane micro heater and temperature sensor were fabricated in micro chamber. The curves of micro heater and temperature sensor and its SEM (scan electron microscope) photos were presented. The experiments confirmed that Ni is suitable for temperature sensor and NiCr is better heating material, which can meet the request for PCR temperature cha racteristic of biochip.
出处
《微纳电子技术》
CAS
2003年第7期332-334,337,共4页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目 (60 1740 3 4)
