摘要
纳米复合膜是当前表面工程领域的发展前沿,综述了纳米复合膜的研究现状及进展,分析了纳米复合膜的特点、制备工艺及用途,对纳米复合膜的发展趋势提出了一些看法。
The nano-composite coating is the front field in the development of surface engineering. The present status and developing tendency of nano-composite coating were summarized, and the properties, deposition techniques and application of nano-composite coating were also analyzed. Finally the trends in developing of nano-composite coating were outlined.
出处
《材料保护》
CAS
CSCD
北大核心
2003年第5期20-23,共4页
Materials Protection
关键词
纳米复合膜
磁控溅射
硬度
摩擦学性能
nano-composite coating
magnetron sputtering
hardness
tribological property
