摘要
综述了驻极体声传感器及其储电材料近年来的迅猛发展。传统的FEP(tetrafluoroethylene-hexa-fluoropropylenecopolymer)驻极体电容式声传感器及以铁电聚合物PVDF(polyvinylidenefluoride)家族为芯片的声传感器和超声换能器仍焕发着青春活力。Si基微型驻极体声传感器的理论和实验研究已经日趋成熟,而用空间电荷型多孔聚合物驻极体压电薄膜为芯片可望研制出新一代声电和电声传感器、压力传感器和驱动器。
In the pap er,the recent rapid development of electret sensor and their charge storage m a-terials are reviewed.Traditional condenser sensor made of FEP(tetrafluoroet hylene-hexa-fluoropropy-lene copoly mer)film electret,acoustic sensor and u ltrasonic transducer made of ferroelectric polymer PVDF(poly vinylidene fluorid e)family still have active life.Theoretic and experimental study results of mi niature silicon electret sensor become better and better.In the near future,a new generation of acoustic-electric and electroacoustic sensors,piezoelectric sensors and actuators will be made of porous polymeric film electrets with spac e charge.
出处
《电声技术》
北大核心
2003年第7期40-43,共4页
Audio Engineering
基金
国家自然科学基金资助项目(500730160)
德国VW基金会资助的中德合作科研项目(Ref.I/77365).
