摘要
1.引言随着大规模集成芯片上的器件尺寸的微型化,为解决微小尺度的各种功能器件关键参数的直接提取及建立一种在线的综合检测与分析技术,半导体器件参数比例差值谱分析系统运用一种新的数据处理运算概念,即比例差值算符,揭示了元器件的另一种本征特性——比例差值特性。经过严格的理论与实验证明,只要代表元器件性能的函数满足比例差值谱函数定理[1,2]。
出处
《中国集成电路》
2004年第1期67-70,83,共5页
China lntegrated Circuit
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