摘要
半导体晶圆专用UPSS电子级氢氟酸在储存过程中容易受到污染且储存周期短,为2~3 d。从储存设备的内衬材质和新型特殊自呼吸装置两方面进行了研究。通过选择内衬材质和新型特殊自呼吸装置,成功解决了金属离子不断释放污染产品的问题,并延长储存周期至30 d。
UPSS grade hydrofluoric acid for semiconductor wafer was easily to be contaminated during storage,and its shelf life is short( 2 ~ 3 d). The article studies on the lining material of storage facilities and new special self-breathing apparatus. Through the selection of lining material and new special self-breathing apparatus,the problem of continuous release of metal ions was solved and the shelf life was extended to 30 d.
出处
《有机氟工业》
CAS
2018年第1期20-23,共4页
Organo-Fluorine Industry
