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金属有机沉积涂层导体La_2Zr_2O_7缓冲层长带制备

Fabrication of Long Length Baseband of Buffer layer of Metal Organic Deposited Coating conductor La_2Zr_2O_7
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摘要 采用辊到辊方式利用金属有机沉积(MOD)技术在双轴织构的Ni W合金基带上制备了烧绿石结构的La2Zr2O7(LZO)缓冲层长带样品,利用X射线衍射(XRD)和原子力显微镜(AFM)对长带样品不同部位截取短样的织构和表面形貌进行了分析.结果表明,已经制得了具有良好c轴织构且表面光滑的LZO膜.然而长带样品的织构锐利度小于静态短样的织构度,可以认为,热处理过程中影响升温速率以及恒温热处理时间的走带速度是获得高质量长带缓冲层样品的关键因素. In this paper,the sample of long length baseband of La2Zr2O7( LZO) buffer layer with pyrochlore structure was fabricated on the Ni W baseband of bi-axial texture by using of the roll to roll mode and the metal organic deposition( MOD) technology,and X ray diffraction( XRD) and atomic force microscopy( AFM) were used to analyze the texture and surface morphology of the short length samples extracted from the different positions of long length baseband of buffer layer. The result indicates that the LZO film with good c axis texture and smooth surface is obtained. However,the texture sharpness of the long length baseband samples is less than the texture degree of the static short length sample,and we can think that in the heat treatment process,the walking speed of baseband that influencing the heating rate and the time of heat treatment in constant temperature is the key factor to obtain the long-length baseband buff-er layer sample with good performance.
出处 《西安文理学院学报(自然科学版)》 2015年第4期8-11,共4页 Journal of Xi’an University(Natural Science Edition)
基金 国家自然科学基金资助项目(51302225 51202201) 陕西省西安市未央区科技计划项目(201412) 陕西省自然科学基金青年人才项目(2014JQ6202) 广西有色金属及特色材料加工重点实验室开放基金项目(GXKFJ12-01)
关键词 LA2ZR2O7 金属有机沉积 织构 表面形貌 涂层导体 缓冲层 La2Zr2O7 metal organic deposition texture surface morphology coated conductor buffer layer
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参考文献14

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