摘要
本文介绍一种微波腔体微扰法测量塑料薄膜厚度的仪器。测厚仪的主要特点是:用圆柱TE_(011)模谐振腔作为厚度的传感器,它将厚度参量转换为谐振频偏值;用电调谐的场效应压腔振荡器(FET—VCO)作为微波源,它与指示电路将频偏值转换为输出电压V_0,经定标后的V_0值就直接指示塑料薄膜厚度。测量装置结构简单,测量快速方便,可实现无接触测量,不受静电干扰,对介电常数e_t’=2.0～3.0塑料薄膜,分辨率优于0.21μm。
This article introduces a simple thickness meter for the measuring of plastics film by cavity perturbation. The main features of the meter are as follows: The cylinder TE011 cavity with high Q is used as the sensor of the thickness. It transforms the thickness into resonant frequency shift. The electronic tuning field effect transistor and voltage controlled oscillator are used as the microwave oscillator (FET+VCO), which together with the indicating circuit change the frequency shift into output voltage Vo. The calibrated Vo then indicates immediately the thickness of the film. The meter is simple in structure, fast and convenient for use. And a contactless measuring could be made, without electrostatic interference. For the plastics film with electric constant (?)=2.0—3.0, the resolving power is thigher than 0.2 μm.
出处
《塑料工业》
CAS
CSCD
北大核心
1992年第3期45-47,49,共4页
China Plastics Industry
