摘要
以五水四氯化锡,钛酸四正丁酯为原料,采用水热法制备出二氧化锡和二氧化钛摩尔比分别为2∶1;6∶1;8∶1的氧化钛、氧化锡复合纳米粉,分别将这3种复合纳米粉体涂敷在平面叉指金电极表面制成湿度敏感元件.采用复阻抗法测试了各元件对湿度的湿敏性能;对元件的灵敏度,响应及恢复特性进行了研究;分析了氧化钛掺杂量、工作频率对湿敏元件湿敏性能的影响.结果表明复合材料的阻抗值随工作频率和相对湿度的减小而增大,在低湿、低频下薄膜的阻抗值达到最大;氧化钛的加入改善了二氧化锡基薄膜的湿敏性能;二氧化锡和二氧化钛摩尔比为6∶1的薄膜表现出最高的灵敏度,当相对湿度从11%变化为95%时,元件的灵敏度达到12 080,具有较短的响应时间和恢复时间.
The three composite nanopowders with tin oxide and titanium oxide molar ratio of 2∶1, 6∶1 and 8∶1were prepared by hydrothermal method using tin chloride pentahydrate and tetrabutyl titanate as raw materials. The composite powders were coated on the interdigitated gold electrodes to make humidity sensors. The humidity-sensitive properties of these sensors were studied by impedance measurements. The results show that the impedance values of sensors increase with the work frequency and relative humidity decreasing, and the maximum impedance values of the sensors are obtained at the lower frequency and relative humidity; the addition of titanium oxide improves the humidity-sensitive properties to some extent; the sensor with tin oxide to titanium oxide molar ratio of 6 ∶1 exhibits the highest sensitivity of 12 080 when the relative humidity changes from 11% to 95%,which shows shorter response time and recovery time.
出处
《武汉工程大学学报》
CAS
2015年第2期26-29 35,35,共5页
Journal of Wuhan Institute of Technology
基金
国家自然科学基金项目(51072141)
武汉工程大学第五届创新基金项目(CX2013092)
关键词
二氧化锡
薄膜
湿度敏感
tin oxide
thin film
humidity sensitivity
