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SiO_2半波覆盖层对HfO_2/SiO_2高反射膜激光损伤的影响 被引量:11

Effect of λ/2 silica overcoat on laser damage of HfO_2/SiO_2 high reflecting coating
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摘要 研究了 Si O2 半波覆盖层对 Hf O2 /Si O2 高反射膜 1 0 64nm激光损伤的影响 ,分析薄膜的激光损伤特性及图貌得出 ,对于单脉冲 ( 1 -ON-1 )激光损伤 ,Si O2 半波覆盖层能提高 Hf O2 /Si O2 高反射膜的激光损伤阈值 ;可显著降低激光损伤程度 ,减小灾难性损伤发生的概率 ;可大幅度提高 Hf O2 /Si O2 The laser damage of HfO2/SiO2 high reflecting coating with and without λ/2 silica overcoat was studied respectively and the damage threshold and possibility was measured by a 1064 nm longitude mode, 10 ns Nd:YAG laser. The laser damage size and morphology were observed and analyzed by a Normaski microscope. The main conclusions are as follows: (1) the λ/2 silica overcoat does affect laser damage threshold of HfO2/SiO2 high reflecting coating significantly, and increase the laser damage threshold of coating up to 1.5 times; (2) according to laser damage morphologies, λ/2 silica overcoat can reduce the serious damage of HfO2/SiO2 high reflecting coating, and prevent catastrophic damage of the hafnia top layer; (3) for multi-shot laser, λ/2 silica overcoat can greatly improve the stability of HfO2/SiO2 high reflector against the laser pulses after the first shot.
出处 《强激光与粒子束》 EI CAS CSCD 北大核心 2001年第2期137-141,共5页 High Power Laser and Particle Beams
基金 国家 8 6 3惯性约束聚变领域基金!(86 3-4 16 -2 -4 .15 ) 中国工程物理研究院院科研基金!(990 2 2 5 )
关键词 SiO2半波覆盖层 激光损伤阈值 损伤图貌 高反射膜 Inorganic coatings Laser damage Morphology
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  • 1Chow R,Appl Opt,1993年,32卷,5567页 被引量:1
  • 2Chow R,SPIE,1992年,1848卷,349页 被引量:1
  • 3唐晋发,应用薄膜光学,1984年 被引量:1
  • 4Fournet C,Pinot B,Geenen B et al.High damage threshold mirror and polarizers in the ZrO2 SiO2 and HfO2 SiO2 dielectrics systems[].Proceedings of SPIE the International Society for Optical Engineering.1991 被引量:1
  • 5Guenther K H.1064 nm laser damage of thin film optical coatings: A round robin experiment[].Applied Optics.1984 被引量:1
  • 6Becker J,Bernhardt A.ISO11254, an international standard for the determination of the laser induced damage threshold[].Proceedings of SPIE the International Society for Optical Engineering.1994 被引量:1
  • 7Carniglia C K,Hart T T,Staggs M C.Effect of overcoats on 355 nm reflector.Laser-I nduced Damage in Optical Material , Nat . Bur . Std(U. S. A), Spec[].Publ.1984 被引量:1
  • 8Carniglia C K,Aptel J H,Carrier G B et al.The intvestigation of effects of a barrier layer on damage to 1. 064 AR coatings.Laser-I nduced Damage in Optical Material , Nat . Bur . Std (U. S. A), Spec[].Publ.1978 被引量:1

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