摘要
研究了 Si O2 半波覆盖层对 Hf O2 /Si O2 高反射膜 1 0 64nm激光损伤的影响 ,分析薄膜的激光损伤特性及图貌得出 ,对于单脉冲 ( 1 -ON-1 )激光损伤 ,Si O2 半波覆盖层能提高 Hf O2 /Si O2 高反射膜的激光损伤阈值 ;可显著降低激光损伤程度 ,减小灾难性损伤发生的概率 ;可大幅度提高 Hf O2 /Si O2
The laser damage of HfO2/SiO2 high reflecting coating with and without λ/2 silica overcoat was studied respectively and the damage threshold and possibility was measured by a 1064 nm longitude mode, 10 ns Nd:YAG laser. The laser damage size and morphology were observed and analyzed by a Normaski microscope. The main conclusions are as follows: (1) the λ/2 silica overcoat does affect laser damage threshold of HfO2/SiO2 high reflecting coating significantly, and increase the laser damage threshold of coating up to 1.5 times; (2) according to laser damage morphologies, λ/2 silica overcoat can reduce the serious damage of HfO2/SiO2 high reflecting coating, and prevent catastrophic damage of the hafnia top layer; (3) for multi-shot laser, λ/2 silica overcoat can greatly improve the stability of HfO2/SiO2 high reflector against the laser pulses after the first shot.
出处
《强激光与粒子束》
EI
CAS
CSCD
北大核心
2001年第2期137-141,共5页
High Power Laser and Particle Beams
基金
国家 8 6 3惯性约束聚变领域基金!(86 3-4 16 -2 -4 .15 )
中国工程物理研究院院科研基金!(990 2 2 5 )