摘要
薄膜材料已在微电子元件、超导材料、生物材料等方面得到广泛应用 ,为了得到高质量的薄膜材料 ,脉冲激光沉积技术受到了广泛的关注。介绍了脉冲激光沉积技术的原理、特点 ,综述了其在制备半导体、高温超导、类金刚石、铁电、生物陶瓷薄膜等方面的应用和研究现状 。
Thin film materials have been widely used in micro electronics,superconductor,and bioceramics materials. In order to obtain high quality thin films,deposition have attracted more attention. In this paper the principle,the characteristics of the pulsed laser deposition technique are introduced. Its applications in semiconductor,high temperature superconductor,diamondlike,ferroelectric and bioceramics thin films and its current research status are reviewed. The future application trend is prospected.
出处
《激光技术》
CAS
CSCD
北大核心
2003年第5期443-446,共4页
Laser Technology
基金
山东省优秀中青年科学家奖励基金资助项目
关键词
脉冲激光沉积
薄膜
应用
研究现状
pulsed laser deposition
thin film
application
current research status
