摘要
光开关是全光网络(All-OpticalNetwork,AON)的一种基本器件。目前,制作光开关的方法有MEMS、波导、铁电液晶、Bubble、热毛细管、全息技术等。其中,MEMS光开关由于具有体积小、集成度高、能大规模生产等优点而成为光开关研究的热点之一。文章对一种静电驱动的光开关的设计进行了理论分析和仿真,并通过实验研究,证明了方案的可行性;同时,表明工艺技术是MEMS光开关研究成败的关键。
Optical switch is one of the core devices for AllOptical Network (AON) There are a number of approaches to making optical switches, such as MEMS, ferroelectric liquid crystal, bubble, thermooptics, holograms, acoustooptics, thermocapillarity and so on Among them, MEMS is an important technology due to its compactness, high integration density and its possibility of mass production In this paper, an electrostatic MEMS optical switch is designed A theoretical analysis is made and an experiment is conducted, both of which demonstrate the feasibility of the design The study shows that processing technology is the key to the development of the optical switch
出处
《微电子学》
CAS
CSCD
北大核心
2003年第5期411-414,共4页
Microelectronics
基金
重庆市2001年度院士基金项目(6795)
重庆邮电学院青年基金项目(A2003-06)共同资助
