摘要
试样基片经常规渗碳、淬火及不同的表面处理后,应用非平衡闭合磁控溅射技术在其表面镀制类石墨复合膜,分析不同基片应力状态下复合膜的组织和性能,研究基片表面不同应力状态对类石墨复合膜性能的影响。结果表明:表面应力状态对类石墨复合膜的形貌、成分、成膜速度及综合性能有一定的影响,适当的压应力可以有效改善类石墨复合膜的摩擦学性能。
The sample substrate was subjected to conventional carburizing,quenching and different surface treatment.Graphite-like composite film was deposited on its surface by unbalanced closed magnetron sputtering technique.The microstructure and properties of composite films with different substrates stress states were analyzed,and the effects of different stress states on the properties of graphite-like composite films were studied.The results show that,the surface stress state has a certain effect on the morphology,composition,film forming speed and comprehensive properties of graphite-like composite films.Proper compressive stress can effectively improve the tribological properties of graphite-like composite films.
作者
宇文江涛
王佐平
张亚娟
王育召
丁超
龙晓云
符昊
YUWEN Jiangtao;WANG Zuoping;ZHANG Yajuan;WANG Yuzhao;DING Chao;LONG Xiaoyun;FU Hao(CSIC Xi'an Shipbuilding Industry Co.,Ltd.,Xi'an 710000,China;No.12 Research Institute of CSIC,Xingping 713102,China)
出处
《热加工工艺》
北大核心
2019年第10期172-176,共5页
Hot Working Technology
关键词
非平衡闭合磁控溅射
类石墨复合膜
基片
压应力
摩擦学性能
unbalanced closed magnetron sputtering
graphite-like composite films
substrate
compressive stress
tribological properties
