摘要
随着微技术的发展,对微观结构的精确测量变得越来越重要。对能够用于微观几何形状测量的扫描探针显微技术———扫描隧道显微术(STM)、扫描光学近场显微术(SNOM)和原子力显微术(AFM)进行了比较详细的分析和介绍。
With the development of microtechnology, the measurement of the geometry of microstructures with high accuracy becomes more and more important. Some of the techniques of scanning probe microscopy which are used for micro-geometry measurement are summarized and analyzed, including scanning tunneling microscopy,scanning near-field optical microscopy and atomic force microscopy.
出处
《传感器技术》
CSCD
北大核心
2003年第9期8-11,15,共5页
Journal of Transducer Technology
