摘要
从MEMS器件的机电耦合关系式出发,采用关系式各项与电路相对应的方法,研究了刚性平行极板纵向运动静电换能器的大信号等效电路的宏模型,其中利用了SPICE中的多项式受控源的形式来简化等效电路结构。对带有此刚性极板结构的集总参数的理想静电传感器进行系统级模拟,并对所建立的传感器大信号等效电路宏模型进行了分析及验证。
Derived from the electromechanical coupling relationship, a large-signal macromodel for the equivalent circuit representation of rigid parallel transverse plates is studied with the approach that each polynomial corresponds to related circuits. The polynomial controlled sources of SPICE are used to simplify the equivalent circuit structure. System-level simulations are then carried out for a lumped-parameter ideal electrostatic sensor which contains the rigid plates. Analysis and verification are then given out.
出处
《电子器件》
CAS
2003年第3期283-286,共4页
Chinese Journal of Electron Devices
基金
国家863计划资助项目(课题编号:2002AA404010)
教育部重大项目(重大0216)
