摘要
在恒定气压和电压条件下,用测量溅射减量的方法,系统研究了Cr—Fe,Bi-Sb,Cu—Zn,Ag—Cu,Al-Zn和Cd—Sn六个系统的25个试样在辉光放电灯中溅射率与组分的关系结果表明;阴极溅射在稳态时,二元合金(不形成金属间化合物)的溅射率与组元浓度的普遍关系是双曲线,只有在某些特殊情况下,两组元的溅射率相差不大时,可以近似看成线性关系。
Investigation was made of the sputtering rate in glow discharge lamp with re-
lation to constituent of 25 different specimens of 6 binary systems, namely, Cr-Fe, Bi-Sb,
Cu-Zn, Ag-Cu, Al-Zn and Cd-Sn, by measuring mass loss after each sputtering under con-
stant Ar pressure and voltage applied. The correlation, in general, between sputtering rate and
concentration of constituent of these non-intermetallic binary alloys obeys the hyperbolic law
under steady state, yet may be approximately regarded as linear only on certain special condi-
tion if the two components of the alloys with similar sputtering rates.
出处
《金属学报》
SCIE
EI
CAS
CSCD
北大核心
1992年第5期B225-B229,共5页
Acta Metallurgica Sinica
基金
国家自然科学基金
上海高教局科技发展基金资助课题
关键词
二元合金
辉光放电
溅射率
cathode sputtering
glow discharge
binary alloy
sputtering rate
