摘要
金刚石薄膜由于其独特的物理、化学和电学等特性,使其作为在极具发展潜力的MEMS中一种理想的材料,越来越得到人们的重视。此外近来各种金刚石薄膜的合成和加工方法已不断发展,使金刚石薄膜MEMS已逐步从原理的证明转向了实际的应用。本文简述了金刚石膜在MEMS中应用的技术基础及其在MEMS中应用的最新进展,着重介绍了金刚石喷嘴在生物芯片中的应用;半导体金刚石探针(既可用作隧道扫描显微镜探针又可作为一种抛光表面的微型工具);世界上最微型的金刚石外科手术刀及微型电夹。
The excellent physical, and chemical, electrical properties of diamond thin films make it an ideal material for microelectronmechanical systems (MEMS). Besides, various methods for the preparation of diamond films, and various micromachining techniques for diamond thin films have been developed. There is, therefore, a growing interest in utilizing diamond thin films as a material in MEMS. So, diamond MEMS is moving from a proof of concept to practical applications. This paper expounds these technical basis and the current development for diamond thin film applications in EMES, including a diamond inkjet application to boichip, a semiconductive diamond tip for a scanning tunneling microscope (STM) as well as a micromachining tool, and a smallest diamond scapler.
出处
《功能材料》
EI
CAS
CSCD
北大核心
2003年第3期349-351,共3页
Journal of Functional Materials
