摘要
提出了一种基于布拉格光栅应变传感技术的微机电甲烷传感器结构。该结构由光波导和布拉格光栅应力传感器,及双端固定微型双金属梁、甲烷无焰燃烧催化剂薄膜层、温度补偿光栅等主要结构组成。通过数值模拟得出波长漂移量与甲烷浓度间的线性关系,与传统催化型甲烷传感器比较,该微结构可以通过MEMS加工工艺制造,具有体积小、功耗小、易校准、便于组网等优点。
Novel micro Methane transducer is proposed based on FBG strain sensor technology. The micro thermometal cantilever with waveguide FBG sensor is used as transducer, which the methane makes flameless combustion on the catalyst film touched with thermometal cantilever. The whole micro structure can be fabricated by MEMS manufacture routing, which gives many advantages with the small volume.
出处
《煤炭技术》
CAS
北大核心
2014年第6期161-162,共2页
Coal Technology
基金
陕西省教育厅自然科学研究项目(2013JK0864)
关键词
甲烷传感器
微机电
光栅
双金属梁
methane transducer
MEMS
bragg grating
thermometal cantilever
