摘要
The vertical cavity surface emitting laser (VCSEL) arrays and VCSEL-based optical transmission modules are investigated.It includes the VCSEL's spectral characteristic,modulation characteristic,high frequency characteristic,and compatibility with microelectronic circuit.The module consists of 1×16 VCSEL array and 16-channel lasers driver with 0.35μm CMOS circuit by hybrid integration.During the test process,the module operates well at more than 2GHz in -3dB frequency bandwidth.
研究了垂直腔面发射激光器 (VCSEL)及其列阵器件的光谱特性、调制特性、高频特性及与微电子电路的兼容性 ,将 1× 16的VCSEL与CMOS专用集成电路进行多芯片组装 (MCM ) ,混合集成为 16信道VCSEL光发射功能模块 .测试过程中 ,功能模块的光电特性及其均匀性良好 ,测量的 - 3dB频带宽度大于 2GHz.
基金
国家高技术研究发展计划 (编号 :2 0 0 1AA12 2 0 32 ,2 0 0 1AA312 0 80 ,2 0 0 2AA312 2 40 )
国家自然科学基金 (批准号 :6 9896 2 6 0 )资助项目~~
