摘要
采用非干扰的实时光谱学诊断检测手段,对XeCl准分子激光烧蚀沉积Y-Ba-Cu-O高温超导薄膜过程中的等离子体辐射进行了研究,光谱分析结果表明,由靶面出射的沉积粒子不仅有Y、Ba、Cu原子和YO、BaO、CuO分子,而且还有大量的一价和二价钇、钡、铜离子。实验中还探讨了发光辐射与激光能量密度及其充氧压的变化关系。
The nonintrusive optical emission spectroscopic diagnosis technique is used to determine the identity of species in the Laser-induced plasma from ablated Y_1 Ba_2 Cu_3O_x superconducting terget. In this experiment, not only Y, Ba, Cu atoms and YO, BaO, CuO moleculae were detected, but also the spectrum lines from Y^+, Y^(++), Ba^+ , Ba^(++), Cu^+, Cu^(++) ions were observed. Meanwhile, the variation characteristics of emission spectra with varying the oxygen gas pressure and changing the laser energy density was studied in detail.
出处
《光谱学与光谱分析》
SCIE
EI
CAS
CSCD
北大核心
1992年第2期57-62,共6页
Spectroscopy and Spectral Analysis