摘要
采用微波等离子体 CVD(MPCVD)法在 YG6 硬质合金基体表面沉积金刚石涂层 ,在金刚石的形核和生长阶段分别采用不同的沉积条件 ,研究了分步沉积工艺对金刚石涂层形核、质量及其附着性能的影响 .结果表明 :采用分步优化的沉积工艺 ,可明显改善金刚石涂层与刀具基体之间的附着性能 ,这主要是由于基体表面形核密度的提高 ,增大了涂层与基体之间的实际接触面积 .
Diamond coatings are deposited on the cobalt cemented tungsten carbide (YG 6) substrates by microwave plasma CVD(MPCVD) method, and the effect of the two-step deposition, that is, different deposition conditions are used during the nucleation and growth periods, on the nucleation, quality and adhesion of diamond coatings is studied. The results show that the adhesion strength of diamond coatings is improved remarkably by optimizing the deposition conditions. This is due to an increase in the contact area between diamond coating and the cemented carbide substrate by enhancing the diamond nucleation density.
出处
《郑州大学学报（理学版）》
CAS
2003年第1期36-39,51,共5页
Journal of Zhengzhou University:Natural Science Edition
基金
河南省科技攻关项目
编号 991110 13 0 .
