摘要
扫描探针刻蚀技术主要利用原子力显微镜针尖和基底间的电、机械或热相互作用进行纳米级表面的成像、操纵和修饰,是一种简便、快速、精确的纳米结构制备技术.其中,扫描探针氧化刻蚀技术利用针尖与样品表面间形成的高度局域化水桥,通过电化学反应在材料表面制备微纳尺度结构,已被广泛用于制备纳米级功能化图案和微纳器件.本文对扫描探针氧化刻蚀过程的机理及其影响因素,如电压、针尖-样品间作用力、持续时间、相对湿度和扫描速度等进行了详细介绍,总结和梳理了利用这一技术制备微纳器件方面的工作,指出了其优点和存在的问题,并对其未来发展进行了展望.
Scanning probe lithography technology is mainly used the electrical, mechanical or thermal interaction between the atomic force microscope tip and substrate to perform imaging, manipulation and modification of the nanoscale surface. It is a simple, rapid and accurate nanostructure preparation technique. The scanning probe oxidation lithography technology has a good prospect, using highly localized water bridge formed between the tip and the sample surface to prepare micro-nano scale structures on material surface through electrochemical reactions. It has been widely used to produce nano-scale functionalized patterns and micro-nano devices. The mechanism of the patterning process and influencing factors such as voltage, tip-sample force, duration, relative humidity, and scanning speed are described in detail in this paper. Then, the work on the preparation of micro-nano devices using this technology is summarized.Finally, we discussed the advantages and problems of this technology, as well as the potential solution and development of it.
作者
田丽贤
于曦
雷圣宾
胡文平
Lixian Tian;Xi Yu;Shengbin Lei;Wenping Hu(Tianjin Key Laboratory of Molecular Photoelectric Science,School of Science,Tianjin University,Tianjin 300072,China)
出处
《中国科学：化学》
CAS
CSCD
北大核心
2019年第3期455-469,共15页
SCIENTIA SINICA Chimica
基金
国家自然科学基金(编号:21572157
21773169
51633006)
科技部国家重点专项(2016YFB0401100)
天津大学北洋青年学者计划资助项目
关键词
原子力显微镜
扫描探针氧化刻蚀技术
微纳器件制备
atomic force microscope
scanning probe oxidation lithography technology
micro-nano device preparation
