摘要
用磁控阴极等离子体溅射技术在云母基底上制做镀膜锰铜压阻计。5—56GPa冲击应力的标定实验表明,该计的压阻性能稳定。压阻系数的拟合式为ps（GPa）=-0.14+90.63（△R/R0）+10.81（△R/R0）2-7.64（△R/R0）2式中R0为锰铜计初始电阻,△R为受压时的电阻变化值。
The magnetically controlled cathod plasma sputtering technique has been successfully used to manufacture a plating-type manganin piezoresistance gauge on a mica matrix plate. Calibration experiments under pressures 5 to 6GPa show that the piezoresistance behavior is well-reproduceable. The pressure-piezoresistance fit of the gauge can be mritten asP(GPa) =- 0. 14 + 90. 63( R/R0 ) + 10. 81(R/R0 )2 - 7. 64(R/R0 )3here, R0 is the initial resistance of the gauges, ΔR the resistance increment under shock loading.
出处
《高压物理学报》
CAS
CSCD
北大核心
1992年第1期68-74,共7页
Chinese Journal of High Pressure Physics
基金
中国工程物理研究院预研基金
关键词
镀膜锰铜计
冲击应力
压阻系数
plating manganin gauge, shock pressure, piezoresistance coefficient.
