摘要
针对半导体集成电路行业的迅猛发展,概述了作为半导体工业基础的半导体硅材料在近20年来的发展状况,着重阐明了当代化学技术及其产品对硅材料制造业发展的重要作用,以及随着硅材料业向更高层次的迈进,给化学化工行业带来的挑战与机遇。
In view of the dramatic development of semiconductor integrated circuit industry, the authors summarize the development process of semiconductor silicon material in the recent 20 years. The authors emphatically expound the great effect of modern chemical technology and its products on the expansion of silicon material manufacturing industry, and the great challenge and opportunity it will bring to chemistry and chemical engineering, with silicon material industry development on a higher level.
出处
《化工生产与技术》
CAS
2002年第6期18-20,共3页
Chemical Production and Technology
关键词
半导体集成电路
半导体硅材料
化学技术
研磨液
抛光浆
semiconductor integrated circuit, semiconductor silicon material, chemical technology, lapping liquid, polishing liquid
